APPARATUS AND METHOD FOR ALIGNING SUBSTRATE

摘要

The present invention relates to an apparatus and a method for aligning a substrate and, more specifically, to an apparatus and a method for aligning a substrate to dissolve or reduce sagging of a substrate by sagging correction of a substrate. The apparatus for aligning a substrate according to an embodiment of the present invention comprises: a first moving body which moves vertically; a second moving body which is provided on the first moving body and moves vertically; a plurality of substrate support portions which are connected and interlocked to the second moving body, and the lower ends of which are bent inwards to support the substrate; and a driving unit which provides a driving force capable of independently moving the first moving body and the second moving body.