| 摘要 |
PROBLEM TO BE SOLVED: To provide a biaxial optical deflector capable of scanning large diameter laser beam to a biaxial direction at high speed and large angle.SOLUTION: A biaxial optical deflector 5 is configured so that: a first drive part of a mirror drive part 11 oscillates a mirror part 10 around a first axial line, a second drive part oscillates a movable frame containing the first drive part around a second axial line which is orthogonal to the first axial line. If plural sets of the mirror part 10 and mirror drive part 11 are arranged in an array state, they serve as a large mirror, and if the mirror drive parts 11 are driven synchronously, they are operated as a single scanning mirror.SELECTED DRAWING: Figure 3 |
