发明名称 ORGANIC LAYER DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS USING THE SAME, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED USING THE METHOD
摘要 An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method, and in particular, an organic layer deposition apparatus that is suitable for use in the mass production of a large substrate and enables high-definition patterning, a method of manufacturing an organic light-emitting display device by using the same, and an organic light-emitting display device manufactured using the method.
申请公布号 US2013341598(A1) 申请公布日期 2013.12.26
申请号 US201213654378 申请日期 2012.10.17
申请人 SAMSUNG DISPLAY CO. LTD. 发明人 CHANG YUN-HO;KIM TAE-YONG;YOON MI-JOO
分类号 C23C16/52;B05D5/12;C23C16/04;H01L27/32 主分类号 C23C16/52
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