| 摘要 |
PROBLEM TO BE SOLVED: To ensure waiting positions of trays in a substrate manufacturing apparatus for manufacturing small-diameter wafers.SOLUTION: A substrate manufacturing apparatus comprises: a plurality of trays 12 each having a counter sunk hole of a shape capable of loading a plurality of small-diameter wafers 11; an atmospheric transfer chamber 21 including a transfer robot 13 for transferring the small-diameter wafers 11 and the trays 12, a small-diameter wafer cassette 14 on which a small-diameter wafer 11 before processing is manually placed and from which a small-diameter wafer 11 after processing is manually picked up, an aligner 15 for aligning positions and orientation of the small-diameter wafers 11 loaded on the trays 12, and a transfer unit 16 for aligning positions and orientation of the trays 12; and a processing unit 22 for processing the small-diameter wafers 11 loaded on the tray 12. The atmospheric transfer chamber 21 further includes a tray stocker 17 having a plurality of stairs 18 capable of storing the trays 12. Accordingly, waiting positions of the trays can be ensured in the substrate manufacturing apparatus for manufacturing small-diameter wafers. |
