| 摘要 |
PROBLEM TO BE SOLVED: To suck a film substrate without generating creases.SOLUTION: A suction device 1000 includes a breathable plate 1315, an exhaust device 1500, and a selectively operating device 1400. The breathable plate has a sucking face 1315A disposed facing the other face 100B of the flexible substrate 100, a back face 1315B positioned on an opposite side of the sucking face, and a plurality of suction holes 1306 which connect between the sucking face and the back face. The exhaust device makes pressure of the back face side of the breathable plate negative pressure than the sucking face side. The selectively operating device selects suction holes, on which the negative pressure is directly exerted, from suction holes in the plurality of suction holes 1306 having openings on positions facing the other face of the flexible substrate, and controls to spread a range of sucking in the other face of the substrate. |
