SUPERLATTICE STRUCTURE AND SEMICONDUCTOR DEVICE HAVING THE SAME

摘要

Disclosed are a super lattice structure and a semiconductor device having the same. The super lattice structure includes a pair of a lower layer and an upper layer that consists of different materials and laminated pairs consisting of at least two pairs. Two layers in one pair have the same thickness. The total thickness of each laminated pair is different. [Reference numerals] (AA) Growth direction