| 摘要 |
A method for manufacturing a semiconductor device includes: preparing a semiconductor wafer including a plurality of semiconductor chips arranged in the shape of a matrix, the semiconductor wafer having a first bump electrode formed on one face thereof; forming a depressed portion on a first face of the semiconductor wafer, the depressed portion partitioning the semiconductor wafer into respective semiconductor chips; placing the first face of the semiconductor wafer onto a support tape; and cutting the semiconductor wafer along the depressed portion from a second face opposite to the first face of the semiconductor wafer by the use of a dicing blade having a width smaller than the width of the depressed portion to thereby divide the semiconductor wafer into a plurality of semiconductor chips. |
