发明名称 |
STRENGTHENED MICRO-ELECTROMECHANICAL SYSTEM DEVICES AND METHODS OF MAKING THEREOF |
摘要 |
<p>In an embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam, and can have a non-linear shape. In another embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam. The isolation joint can have a first portion, a second portion, and a bridge portion between the first portion and the second portion. The first and second portions of the isolation joint can each have a seam and a void, while the bridge portion can be solid.</p> |
申请公布号 |
EP2675748(A2) |
申请公布日期 |
2013.12.25 |
申请号 |
EP20120704642 |
申请日期 |
2012.02.13 |
申请人 |
KIONIX, INC. |
发明人 |
BLACKMER, CHARLES, W.;ADAMS, SCOTT, G.;HOCKING, ANDREW, S.;LYNCH, KRISTIN, J.;SHAH, ASHISH, A. |
分类号 |
B81C1/00;H01L21/762 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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