| 摘要 |
The purpose of the present invention is to provide an apparatus to measure a compressed deformation of a pad capable of measuring accurate compressed deformation of the pad in a state to supply a slurry. The apparatus comprises: a plate to mount a pad; a contact part having a contact surface which contacts with the pad mounted on the plate; a connecting part arranged in the contact part; a thickness measuring part arranged in the connecting part, measuring a thickness of the pad part; a pressing part arranged in the thickness measuring part, and to compress the pad by applying pressure to the pad via the contact surface; and a fluid supply pipe to supply the fluid to the pad part located under the contact surface. |
