| 摘要 |
PROBLEM TO BE SOLVED: To improve nonuniformity in close contact due to the density of the opening pattern of a film deposition mask.SOLUTION: A magnet sheet applies a magnetic field to a film deposition mask 5 consisting of a magnetic metal material having a plurality of opening patterns 6 to attract the film deposition mask and closely contacts and holds a substrate to be deposited with the film deposition mask 5. According to the in-plane distribution of areas having large and small volumes occupied by the magnetic metal material of the film deposition mask 5, the strength of the magnetic field has an in-plane distribution.SELECTED DRAWING: Figure 2 |
