| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro gas sensor capable of preventing lowering of sensitivity.SOLUTION: A micro gas sensor supports a detected element 20 in a suspended state in a recessed space 11 formed on a substrate 10. The detected element 20 includes: a detection resistor 22 that is formed on a surface side of an insulation film 30 and where electric resistance changes according to concentration of gas to be detected; and a catalytic layer 21 that is provided at a position near the detection resistor 22 and covers a periphery of the detection resistor 22 including its both sides through an aperture 33 of the insulation film 30. The insulation film 30 includes an arc part 34 that is formed in the recessed space 11 so as to cover a side periphery of the detected element 20, and the catalytic layer 21 covers both sides of the detection resistor 22 through the aperture 33 of the insulation film 30 and also covers the periphery of the detection resistor 22 in a state of covering the arc part 34. |
