| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a shape measuring apparatus capable of highly accurately measuring the surface shape of an object to be measured, and to provide a shape measuring method. <P>SOLUTION: The shape measuring apparatus S measures the thickness of an object to be measured WA by a one-surface measuring section 2 and an another-surface measuring section 3 for performing optical heterodyne interference, and measures the thickness and surface shape of the object to be measured WA by a single measurement, by having the object to be measured irradiated by the one-surface measuring section 2 with a plurality of measuring lights. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT</p> |
