发明名称 THIN FILM TRANSISTOR ARRAY SUBSTRATE, METHOD FOR MANUFACTURING SAME, DISPLAY PANEL, AND DISPLAY DEVICE
摘要 <p>Embodiments of the present invention provide a thin film transistor array substrate, a method for manufacturing the same, a display panel and a display device. The method for manufacturing the thin film transistor array substrate comprises: sequentially depositing a first metal oxide layer, a second metal oxide layer and a source and drain metal layer, conductivity of the first metal oxide layer being smaller than conductivity of the second metal oxide layer; patterning the first metal oxide layer, the second metal oxide layer and the source and drain metal layer, so as to form an active layer, a buffer layer, a source electrode and a drain electrode, respectively. According to technical solutions of the embodiments of the invention, it is possible that the manufacturing process of the metal oxide TFT array substrate is simplified, and the production cost of products is reduced.</p>
申请公布号 EP2677537(A1) 申请公布日期 2013.12.25
申请号 EP20120829202 申请日期 2012.12.17
申请人 BOE TECHNOLOGY GROUP CO. LTD. 发明人 LIU, XIANG;LEE, WOOBONG
分类号 H01L29/786;G02F1/1368;H01L29/66 主分类号 H01L29/786
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