| 摘要 |
A vacuum apparatus, which conveys a large-sized substrate and saves space is provided. The vacuum apparatus 20 of the present invention comprises pluralities of lower rollers 33, pressing rollers 38 and pressing mechanisms. Since the substrate 7 is sandwiched by the lower rollers 33 and the pressing rollers 38 at a position between the conveying roller 23 and the conveying roller 23, the substrate does not fall down. The substrate 7 contacts the pressing rollers 38 and pushes the pressing roller 38 back, and is sandwiched between the pressing roller 38 and the lower roller 33, so that the substrate 7 is not damaged when sandwiched. |
