发明名称
摘要 A semiconductor device includes a plural number of interconnects and a plural number of vias are stacked. A semiconductor element is enclosed in an insulation layer. At least one of the vias provided in insulation layers and/or at least one of interconnects provided in the interconnect layers are of cross-sectional shapes different from those of the vias formed in another one of the insulation layers and/or interconnects provided in another one of the interconnect layers.
申请公布号 JP5378380(B2) 申请公布日期 2013.12.25
申请号 JP20100521728 申请日期 2009.07.23
申请人 发明人
分类号 H05K3/46;H01L23/12;H01L23/36 主分类号 H05K3/46
代理机构 代理人
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