| 摘要 |
PROBLEM TO BE SOLVED: To perform highly accurate visual inspection without using a positioning device for an inspection object and without performing matching processing using a large amount of templates. SOLUTION: In a visual inspection control apparatus 10, a reference image for normalization and a reference image for inspection are pre-registered in a template information memory unit 11. An image normalization unit 15 for the inspection object normalizes, in a first stage, the image of the inspection object based on a matching result between the low resolution image of the inspection object and the low resolution reference image for normalization. The image normalization unit 15 for the inspection object further normalizes, in a second stage, the image of the object to be inspected which is normalized in the first stage based on the matching result between the image of the inspection object which is normalized in the first stage and the original resolution reference image. An inspection unit 16 performs inspection on the image of the inspection object which is normalized in two stages using the reference image for inspection. COPYRIGHT: (C)2011,JPO&INPIT |
