| 摘要 |
<p>A method of fabricating a capacitive electro-mechanical transducer, comprising:
forming a sacrificial layer for forming a plurality of cavities (107) and a communicating portion (108) between the cavities on a substrate;
forming a membrane layer (109) on the sacrificial layer;
forming an etching hole (111) for exposing a portion of the sacrificial layer to outside in at least a portion of walls forming the cavities;
etching the sacrificial layer through the etching hole to form the cavities and the communicating portion for communicating the cavities with each other;
closing the etching hole to seal the cavities from outside; and
closing at least a portion of the communicating portion to interrupt the communication between the cavities through the communicating portion.</p> |
