发明名称 |
COMPENSATION OF STRESS EFFECTS ON PRESSURE SENSOR COMPONENTS |
摘要 |
<p>Pressure sensors having components with reduced variations due to stresses caused by various layers and components that are included in the manufacturing process. In one example, a first stress in a first direction causes a variation in a component. A second stress in a second direction is applied, thereby reducing the variation in the component. The first and second stresses may be caused by a polysilicon layer, while the component may be a resistor in a Wheatstone bridge.</p> |
申请公布号 |
EP2675749(A1) |
申请公布日期 |
2013.12.25 |
申请号 |
EP20120709999 |
申请日期 |
2012.02.16 |
申请人 |
SILICON MICROSTRUCTURES, INC. |
发明人 |
AUGUST, RICHARD, J.;DOELLE, MICHAEL, B. |
分类号 |
B81C1/00;G01L1/22;G01L9/00;G01L19/04;G01L19/06;H01L29/84 |
主分类号 |
B81C1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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