发明名称 Method for wire bonding a power semiconductor chip and the corresponding device
摘要 <p>The present invention provides a method for bonding a contact pad (9) of a power semiconductor (3), which is arranged on a substrate (1), to a metallization (7) of the substrate (1), comprising the steps of bonding at least one bonding means (11) of soft metal between the metallization (7) and the contact pad (9), and positioning the substrate (1) with the power semiconductor (3) and the at least one bonding means (11) of soft metal in a depositing bath for depositing a layer (13) of hard metal on the contact pad (9) and the at least one bonding means (11) of soft metal. The present invention also provides a substrate (1) with a power semiconductor mounted thereon, whereby the substrate (1) comprises metallization (7), the power semiconductor (3) has a contact pad (9), and at least one bonding means (11) of soft metal is bonded between the contact pad (9) and the metallization (7), whereby the at least one bonding means (11) of soft metal and the contact pad (9) have a layer (13) of hard metal deposited thereon.</p>
申请公布号 EP2677541(A1) 申请公布日期 2013.12.25
申请号 EP20120172513 申请日期 2012.06.19
申请人 ABB TECHNOLOGY AG 发明人 GEISSMANN, SILVAN;OEZKOL, EMRE
分类号 H01L23/49;H01L21/60;H01L25/07 主分类号 H01L23/49
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