发明名称 High voltage device with partial silicon germanium epi source/drain
摘要 A semiconductor device is provided which includes a semiconductor substrate, a gate structure formed on the substrate, sidewall spacers formed on each side of the gate structure, a source and a drain formed in the substrate on either side of the gate structure, the source and drain having a first type of conductivity, a lightly doped region formed in the substrate and aligned with a side of the gate structure, the lightly doped region having the first type of conductivity, and a barrier region formed in the substrate and adjacent the drain. The barrier region is formed by doping a dopant of a second type of conductivity different from the first type of conductivity.
申请公布号 US8614484(B2) 申请公布日期 2013.12.24
申请号 US20090647031 申请日期 2009.12.24
申请人 TEO LEE-WEE;ZHU MING;CHUANG HARRY HAK-LAY;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 TEO LEE-WEE;ZHU MING;CHUANG HARRY HAK-LAY
分类号 H01L29/00 主分类号 H01L29/00
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