发明名称 |
ACTIVE MATRIX SUBSTRATE, METHOD FOR MANUFACTURING SAME, AND DISPLAY PANEL |
摘要 |
An active matrix substrate (20a) includes a gate electrode (25) formed on an insulating substrate (10a), and a planarizing film (26) formed on the gate electrode (25) and made of a baked SOG material. The gate electrode (25) is a multilayer film including a first conductive film (27) formed on the insulating substrate (10a) and made of a metal except copper, a second conductive film (28) formed on the first conductive film (27) and made of copper, and a third conductive film (29) formed on the second conductive film (28) and made of the metal except copper. |
申请公布号 |
KR20130140814(A) |
申请公布日期 |
2013.12.24 |
申请号 |
KR20137017271 |
申请日期 |
2011.12.20 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
HARA TAKESHI;NISHIKI HIROHIKO;OCHI HISAO;AITA TETSUYA;OKABE TOHRU;NAKANO YUYA |
分类号 |
H01L29/786;G02F1/1368;H01L29/41 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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