发明名称 |
FIELD-EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING SAME |
摘要 |
<p>The present invention achieves a formation of a metal oxide film of a thin film transistor with a simplified process. The present invention is concerned with a method for manufacturing a field-effect transistor comprising a gate electrode, a source electrode, a drain electrode, a channel layer and a gate insulating layer wherein the channel layer is formed by using a metal salt-containing composition comprising a metal salt, a polyvalent carboxylic acid having a cis-form structure of - C(COOH)=C(COOH)-, an organic solvent and a water wherein a molar ratio of the polyvalent carboxylic acid to the metal salt is in the range of 0.5 to 4.0.</p> |
申请公布号 |
KR20130139744(A) |
申请公布日期 |
2013.12.23 |
申请号 |
KR20127021975 |
申请日期 |
2011.12.19 |
申请人 |
PANASONIC CORPORATION;DAI-ICHI KOGYO SEIYAKU CO., LTD. |
发明人 |
HIRANO KOICHI;KOMATSU SHINGO;SAITO YASUTERU;IKE NAOKI |
分类号 |
H01L29/786;H01L21/336;H01L29/12 |
主分类号 |
H01L29/786 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|