发明名称 FIELD-EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING SAME
摘要 <p>The present invention achieves a formation of a metal oxide film of a thin film transistor with a simplified process. The present invention is concerned with a method for manufacturing a field-effect transistor comprising a gate electrode, a source electrode, a drain electrode, a channel layer and a gate insulating layer wherein the channel layer is formed by using a metal salt-containing composition comprising a metal salt, a polyvalent carboxylic acid having a cis-form structure of - C(COOH)=C(COOH)-, an organic solvent and a water wherein a molar ratio of the polyvalent carboxylic acid to the metal salt is in the range of 0.5 to 4.0.</p>
申请公布号 KR20130139744(A) 申请公布日期 2013.12.23
申请号 KR20127021975 申请日期 2011.12.19
申请人 PANASONIC CORPORATION;DAI-ICHI KOGYO SEIYAKU CO., LTD. 发明人 HIRANO KOICHI;KOMATSU SHINGO;SAITO YASUTERU;IKE NAOKI
分类号 H01L29/786;H01L21/336;H01L29/12 主分类号 H01L29/786
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