| 发明名称 |
SEMICONDUCTOR THIN FILM, THIN FILM TRANSISTOR AND PRODUCTION METHOD THEREFOR |
| 摘要 |
<p>A semiconductor thin film includes one or more amorphous metal oxides, an OH group being bonded to at least some of the metal atoms of the amorphous metal oxides.</p> |
| 申请公布号 |
KR20130139915(A) |
申请公布日期 |
2013.12.23 |
| 申请号 |
KR20137009219 |
申请日期 |
2011.10.11 |
| 申请人 |
IDEMITSU KOSAN CO., LTD. |
发明人 |
NISHIMURA MAMI;KAWASHIMA EMI;KASAMI MASASHI;MATSUURA MASAHIDE;ITOSE MASAYUKI |
| 分类号 |
H01L29/12;H01L21/203;H01L21/363;H01L29/786 |
主分类号 |
H01L29/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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