发明名称 THIN FILM TRANSISTOR
摘要 <p>A thin film transistor includes a gate electrode formed on a substrate; a gate insulation film covering the gate electrode; an oxide semiconductor layer formed on the gate insulation film; an etching stopper film formed on a channel forming portion of the oxide semiconductor layer, and a source electrode and a drain electrode covering an edge portion of the etching stopper film. The etching stopper film is made of an insulating material, and the insulating material is capable of attenuating a light having wavelength not greater than 450 nm.</p>
申请公布号 KR20130140185(A) 申请公布日期 2013.12.23
申请号 KR20137029957 申请日期 2012.06.19
申请人 PANASONIC CORPORATION 发明人 SATOH EIICHI;AOYAMA TOSHIYUKI
分类号 H01L29/786;G02F1/1368;H01L21/336;H01L51/50 主分类号 H01L29/786
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