MANUFACTURING METHOD FOR PLASTIC CHAMBER PLATE WITH ORDERED POROUS POLYMER MEMBRANE

摘要

The present invention relates to a method for manufacturing a plastic chamber plate including a polymer membrane with arranged micro-holes. The purpose of the present invention is to improve productivity and reduce a failure rate by enabling the manufacture of a membrane in which micro-holes are arranged and simultaneously performing a membrane manufacturing work and a work for attaching the membrane to a plastic chamber plate. The method for manufacturing a plastic chamber plate including a polymer membrane with arranged micro-holes comprises: a step of forming a sacrificial layer by coating the upper part of a wafer with polymer (S110); a step of forming a photoresist layer by coating the upper part of the sacrificial layer with photoresist (S120); a step of arranging a mask with micro-holes on the upper part of the photoresist layer formed by the step S120 and irradiating the upper part of the arranged mask with ultraviolet rays (S130); a step of removing a portion irradiated by ultraviolet rays by using a development solution after the step S130 and manufacturing the membrane with micro-holes by drying and hardening a part by applying heat (S140); a step of bonding the plastic chamber plate to the upper part of the manufactured membrane (S150); and a step of separating the membrane from the wafer by removing the sacrificial layer by using a solvent after the step S150 (S160).