发明名称 SUBSTRATE DRYING SYSTEM
摘要 The present invention relates to a drying system performing a drying process and, more specifically, to a substrate (PCB) drying system capable of reducing energy and increasing efficiency by performing the drying process with the recirculation of heated air and preventing the damage and the pollution of a substrate in the drying process by spreading the heated air to a direction which is slated to a transfer direction of a substrate in an air knife and drying the surface of the substrate. An embodiment of the present invention comprises a drying room, a blower, a heater chamber, a filter chamber, a main air box, and the air knife. The drying room is an enclosed space and transfers the substrate. The blower inhales and exhales the inner air of the drying room. The heat chamber receives the inner air of the drying room through the blower and heats the inner air by using a heater which is installed inside the heat chamber. The filter chamber receives the heated air and filters various foreign substances from the heated air by using a filter which is installed inside the filter chamber. The main air box receives the heated air. The air knife receives the heated air from the main air box and spreads the heated air to the substrate. The air knife is installed inside the drying room.
申请公布号 KR101342619(B1) 申请公布日期 2013.12.20
申请号 KR20130032664 申请日期 2013.03.27
申请人 CHANGSUNG CO., LTD. 发明人 JUNG, CHAN SOO
分类号 H01L21/302 主分类号 H01L21/302
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