MOVING MECHANISM, ELECTRONIC COMPONENT TRANSPORT DEVICE, ELECTRONIC COMPONENT INSPECTION DEVICE

摘要

A moving unit includes a first moving body arranged in a first direction with regard to a support body, a second moving body moving in a second direction intersecting with the first direction with the first moving direction, and installed in a direction opposite to the support body through the first moving body. A first oscillation body is arranged in the support body and arranged in the first moving body to pressure the support body. A direction facing a first groove and a second groove intersects with a direction facing the support body and the moving body. A vibration direction of the first oscillation body intersects with a direction facing the first groove and the second groove and a direction facing the support body and the moving body.