发明名称 APPLICATION OF TARGET FOR SPARK DEPOSITION AND METHOD OF MAKING SUCH TARGET
摘要 FIELD: metallurgy.SUBSTANCE: target for application of metal oxide and/or metal nitride coating comprises metal matrix accommodating nonconducting metal oxide and/or nitride. Metal matrix is made of oxide and/or nitride metal and structured to bonding grid of grooves filled with said metal. Grid spacing are filled with metal oxide and/or nitride. Proposed method comprises holographic structuring of metal matrix from aluminium and aluminium oxide to produce metal matrix of bonding grid of grooves filled with aluminium, grid spacings being filled with aluminium oxide.EFFECT: application of nonconducting layer on substrate by spark deposition.7 cl, 2 dwg
申请公布号 RU2501885(C2) 申请公布日期 2013.12.20
申请号 RU20110110043 申请日期 2009.08.10
申请人 EHRLIKON TREJDING AG, TRJUBBAKH 发明人 KURAPOV DENIS;LEKHTKHALER MARKUS
分类号 C23C14/32 主分类号 C23C14/32
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