发明名称 |
APPLICATION OF TARGET FOR SPARK DEPOSITION AND METHOD OF MAKING SUCH TARGET |
摘要 |
FIELD: metallurgy.SUBSTANCE: target for application of metal oxide and/or metal nitride coating comprises metal matrix accommodating nonconducting metal oxide and/or nitride. Metal matrix is made of oxide and/or nitride metal and structured to bonding grid of grooves filled with said metal. Grid spacing are filled with metal oxide and/or nitride. Proposed method comprises holographic structuring of metal matrix from aluminium and aluminium oxide to produce metal matrix of bonding grid of grooves filled with aluminium, grid spacings being filled with aluminium oxide.EFFECT: application of nonconducting layer on substrate by spark deposition.7 cl, 2 dwg |
申请公布号 |
RU2501885(C2) |
申请公布日期 |
2013.12.20 |
申请号 |
RU20110110043 |
申请日期 |
2009.08.10 |
申请人 |
EHRLIKON TREJDING AG, TRJUBBAKH |
发明人 |
KURAPOV DENIS;LEKHTKHALER MARKUS |
分类号 |
C23C14/32 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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