发明名称 COATING DEVICE
摘要 <p>Provided is a coating device (1) that can easily and with high precision adjust imaging distance for a workpiece (W). The coating device (1) is provided with: a coating means (2) that coats a coating material on the workpiece (W); an approaching and separating direction drive unit (15) that moves the coating means (2) in a direction approaching and separating from the workpiece (W); an imaging means (3) that images the workpiece (W); and a position correction means (5) that corrects the coating position of the coating means (2) on the basis of imaging data acquired by the imaging means (3). The imaging means (3) is constituted so as to be able to be moved in the direction approaching and separating from the workpiece (W) as a unit with the coating means (2) by the approaching and separating direction drive unit (15). The coating device (1) is provided with a control unit (17) that adjusts the imaging distance of the imaging means (3) with respect to the workpiece (W) by driving of the approaching and separating direction drive unit (15).</p>
申请公布号 WO2013187321(A1) 申请公布日期 2013.12.19
申请号 WO2013JP65810 申请日期 2013.06.07
申请人 CANON MACHINERY INC. 发明人 OZAKI HITOSHI
分类号 B05C11/00;B05C5/00;H01L21/52 主分类号 B05C11/00
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