发明名称
摘要 <p>The non-polar or semi-polar group III nitride layer disclosed in a specific example of the present invention can be used for substrates for various electronic devices, wherein problems of conventional polar group III nitride substrates are mitigated or solved by using the nitride substrate of the invention, and further the nitride substrate can be manufactured by a chemical lift-off process.</p>
申请公布号 JP2013544739(A) 申请公布日期 2013.12.19
申请号 JP20130531517 申请日期 2011.11.04
申请人 发明人
分类号 C30B29/38;C23C16/34;C30B33/08;H01L21/205;H01L21/306;H01L33/32 主分类号 C30B29/38
代理机构 代理人
主权项
地址