CHARGED PARTICLE BEAM OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To present on observation time capable of acquiring an excellent observation image obtained by taking contamination into consideration to a user.SOLUTION: A control computer 52 stores contamination generation rate characteristic data being correlation data between observation condition data previously calculated in each gas type and partial pressure of residual gas 20 and a contamination generation rate in a storage device, measures the gas type and partial pressure of the residual gas 20 in a sample chamber 11 with a mass spectrometer 19 when receiving an input of the observation condition data, acquires contamination generation rate characteristic data associated with the obtained gas type and partial pressure, further acquires a contamination generation rate corresponding to the observation condition data with reference to the contamination generation rate characteristic data, calculates an observable time on the basis of the acquired contamination generation rate and a contamination generation amount threshold preset as a maximum value of a generation amount of contamination material that can acquire an excellent observation image, and displays the observable time in a display device 55.