发明名称 VIBRATING BODY, METHOD OF MANUFACTURING THE SAME AND VIBRATION TYPE DRIVE DEVICE
摘要 A vibrating body comprising a substrate a piezoelectric element comprising a piezoelectric layer and electrode layers and joined to the substrate and a ceramic layer between the substrate and the piezoelectric element, wherein the ceramic layer comprises a first region and a second region which is adjacent to the first region in a direction perpendicular to a thickness direction of the ceramic layer, wherein the first region has a quadrangular prism shape, each side of the first region having a length equal to a thickness of the ceramic layer, wherein the second region has a quadrangular prism shape, each side of the second region having the length equal to the thickness of the ceramic layer, and wherein a difference between a porosity of the first region and a porosity of the second region is not greater than 15%.
申请公布号 US2013334932(A1) 申请公布日期 2013.12.19
申请号 US201313915155 申请日期 2013.06.11
申请人 CANON KABUSHIKI KAISHA 发明人 MARUYAMA YUTAKA;HARADA MASAHIRO;IGARASHI YOSUKE;TSUBOTA YASUHIRO;ONO JUNZABUROU;OGAWA YASUHIRO
分类号 H01L41/053;H01L41/27 主分类号 H01L41/053
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