| 摘要 |
<p>The present invention relates to an apparatus for preparing disilane by pyrolysis of monosilane, comprising: a pyrolysis reaction portion of monosilane; a solid particle-removing portion for removing solid particles generated at the pyrolysis reaction portion; a condensation portion for liquefying and collecting unreacted monosilane, and disilane and higher silanes having three to seven silicon atoms, which are the products of pyrolysis, excluding hydrogen among the solid particle-removed gas; a first separation portion for separating monosilane from a mixture of the liquefied unreacted monosilane, disilane and higher silanes having three to seven silicon atoms; and a second separation portion for separating disilane and higher silanes having three to seven silicon atoms from the monosilane-removed mixture. According to the present invention, it is possible to economically and efficiently prepare high value-added disilane by preparing high purity disilane by pyrolysis of monosilane, thereby maximizing a profit.</p> |
