TEMPLATE FOR NANOIMPRINT AND PATTERN FORMATION METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a technology which reduces defects due to expansion failures of a transferred material when the transferred material supplied onto a transfer base material is placed in contact with a template to expand.SOLUTION: A template for nanoimprint includes: a first region 110 having a first pattern; and a second region 120, which is disposed spaced a predetermined distance away from a periphery of the first region 110 and has a second pattern, on one surface of a base material. The first pattern and the second pattern are linear patterns. A first direction that the first pattern extends and a second direction that the second pattern extends substantially correspond to each other.