摘要 |
PROBLEM TO BE SOLVED: To effectively suppress the generation of both of 'discharge' and 'charge-up' even when a glass substrate is used as a base material of a substrate for electronic amplification.SOLUTION: A glass substrate 15 for electronic amplification has a through hole 14 formed in a plate-like member 11 comprising a plate-like glass material, and is used for generating electron avalanche amplification in the through hole 14. The shape of the glass substrate 15 for electronic amplification and the quality of material of the glass material of the plate-like member 11 are configured such that insulation resistance in the plate thickness direction is 10-10&OHgr; per plane of 100 cm. |