METHOD AND APPARATUS FOR VAPOR CONDENSATION AND RECOVERY

摘要

PROBLEM TO BE SOLVED: To provide methods and apparatus for recovery of precursor vapor from a gas and precursor vapor mixture used in a deposition process.SOLUTION: A gas and precursor vapor mixture is passed through a multitude of heat transfer surfaces 160, 170 in a heat conducting housing causing the precursor vapor to condense. The precursor vapor in liquid form is then collected after condensation. The housing is maintained at a temperature sufficient for the precursor vapor to condense and form the precursor liquid.