发明名称 A MEMS DEVICE
摘要 According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.
申请公布号 WO2013185812(A1) 申请公布日期 2013.12.19
申请号 WO2012EP61196 申请日期 2012.06.13
申请人 LEMOPTIX SA;ABELE, NICOLAS;KHECHANA, FAOUZI;GAMET, JULIEN 发明人 ABELE, NICOLAS;KHECHANA, FAOUZI;GAMET, JULIEN
分类号 G02B26/08 主分类号 G02B26/08
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