| 发明名称 |
METHOD OF ISOLATING NANOWIRES FROM A SUBSTRATE |
| 摘要 |
A method is provided. The method includes forming a plurality of nanowires on a top surface of a substrate and forming an oxide layer adjacent to a bottom surface of each of the plurality of nanowires, wherein the oxide layer is to isolate each of the plurality of nanowires from the substrate. |
| 申请公布号 |
US2013334499(A1) |
申请公布日期 |
2013.12.19 |
| 申请号 |
US201313957965 |
申请日期 |
2013.08.02 |
| 申请人 |
CHU-KUNG BENJAMIN;SHAH UDAY;PILLARISETTY RAVI;JIN BEEN-YIN;RADOSAVLJEVIC MARKO;RACHMADY WILLY |
发明人 |
CHU-KUNG BENJAMIN;SHAH UDAY;PILLARISETTY RAVI;JIN BEEN-YIN;RADOSAVLJEVIC MARKO;RACHMADY WILLY |
| 分类号 |
H01L29/06;H01L21/762;H01L29/775 |
主分类号 |
H01L29/06 |
| 代理机构 |
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