| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas introduction valve capable of controlling gas introduction in good sensitivity.SOLUTION: A gas introduction valve 10 has a chamber 16, a piping 24 having a flow path 23, a valve 20 connected to the piping 24, a piping 34 having a flow path 33, and a valve 30 connected to the piping 34. The valve 20 has a valve element 22 installed to open and close the flow path 23, a tension coil spring 26 connected to the valve element 22 and urging it to the opposite side to the piping 24, and a stopper 25 to restrict the movement of the valve element 22. The valve 30 has: a valve element 32 installed to open and close the flow path 33; a tension coil spring 36 connected to the valve element 32 and urging the valve element 32 to the opposite side to the piping 34; and a stopper 35 to restrict the movement of the valve element 32. The valves 20, 30 perform opening/closing operations according to the differential pressure between the flow path 23 and the flow path 24. |
