| 摘要 |
Method for operating a projection exposure apparatus for microlithography, the projection exposure apparatus comprising an optical element, a manipulator, which acts on the optical element by changing the temperature of the optical element and the deflection of which brings about a heat flow caused by the manipulator into the optical element. The history of the effects, in particular the temperatures introduced into the optical element or the optical effects caused thereby, of the manipulator are recorded in a record. |
