| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding device with an improved grinding rate for performing an EEM process.SOLUTION: A grinding device includes: a container for containing an object to be ground and reserving a grinding solution containing grinding grains; a grinding member 245 disposed in the grinding liquid with an interval to the surface to be ground of the object to be ground; and a rotary head portion for rotating the grinding member 245 with an interval between the grinding member 245 and the surface to be ground. The grinding member 245 includes a base portion 246 formed in a disk shape and rotatably coupled to the rotary head portion around a rotation symmetrical axis of the grinding member, and a plurality of projections 247 formed with intervals circumferentially along the circumferential surface of the base portion 246, is formed in a gear shape, is rotated by the rotary head portion and sweeps the grinding solution so as to make the grinding solution flow for making the grinding grains abut against the surface to be ground. The projections 247 project radially outward of the base portion 246 on the circumferential surface, and are formed spirally by extending in a direction inclined to a direction of extension of the rotation symmetrical axis in the circumferential surface. |
