发明名称 GAS BARRIER FILM AND METHOD FOR PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a gas barrier film with good productivity, high transparency, low haze, and high gas barrier properties, having excellent adhesion strength between compositions, and causing no curl, and to provide a method for producing the gas barrier film.SOLUTION: A gas barrier film includes, in order, on at least one surface of a substrate, an inorganic layer formed by means of vacuum deposition, an inorganic layer formed by means of chemical vapor deposition, an inorganic layer formed by means of vacuum deposition. A method for producing the gas barrier film is also provided.
申请公布号 JP2013253319(A) 申请公布日期 2013.12.19
申请号 JP20130098511 申请日期 2013.05.08
申请人 MITSUBISHI PLASTICS INC 发明人 TSUTSUMI TAKETOMO;AMAUCHI HIDETAKA;YAMAUCHI YASUTSUGU
分类号 C23C14/34;B32B9/00;C23C14/06;C23C14/08;C23C14/10;C23C16/50;H01L31/042;H01L51/50;H05B33/04;H05B33/10 主分类号 C23C14/34
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