PERFORATED BOLOMETER PIXEL STRUCTURE WITH REDUCED VACUUM REQUIREMENTS

摘要

A pixel structure, which may be used for infrared bolometers or other microelectromechanical systems (MEMS) devices, configured to increase immunity of the pixel to molecular heat transfer by molecules (120) and reduce the vacuum requirements for a wafer level packaged device incorporating the pixel or an array thereof. In one example, the pixel has a perforated body (210).