| 摘要 |
An apparatus for performing enhanced wafer quality prediction in a semiconductor manufacturing process includes memory, for storing historical data relating to the semiconductor manufacturing process, and at least one processor in operative communication with the memory. The processor is operative: to obtain data including tensor format wafer processing conditions, historical wafer quality measurements and/or prior knowledge relating to at least one of the semiconductor manufacturing process and wafer quality; to build a hierarchical prediction model including at least the tensor format wafer processing conditions; and to predict wafer quality for a newly fabricated wafer based at least on the hierarchical prediction model and corresponding tensor format wafer processing conditions. |
