| 摘要 |
<p>Disclosed is a capacitance type physical quantity sensor comprising a movable electrode (18) formed in a weight part (17), and a fixed electrode (19) facing the movable electrode. A first movable sensing electrode (21) and a first fixed sensing electrode (24) face each other in a first y direction. A second movable sensing electrode (22) and a second fixed sensing electrode (25) face each other in a second y direction. A first movable damping electrode (23) is located in the middle between two first fixed damping electrodes (26), faces one of the first fixed damping electrodes in the first y direction and faces the other of the first fixed damping electrodes in the second y direction. A plurality of first movable damping electrodes are located point-symmetrically with respect to the center (CP) of the weight part or line-symmetrically with respect to a center line (CL) passing the center along a y direction.</p> |
