| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique advantageous for transferring a mold pattern accurately to a substrate in an imprint device.SOLUTION: The imprint device performs imprint for transferring a pattern onto a substrate, by curing a resin while pressing a mold having a pattern against a resin on the substrate. The imprint device includes a changing section which includes a contact member having a contact surface that comes into contact with the side face of the mold, applies a force to the side face of the mold via the contact member, and changes the shape of a pattern formed in the mold, and an adjusting section for adjusting at least one of the angle and position of the contact member so as to adjust the contact state of the side face of the mold and the contact surface. |
