| 摘要 |
<p>The purpose of the present invention is to provide a technology of suitably inverting a plurality of substrates at one time. In order to achieve the purpose, this substrate inverting apparatus is provided with: a supporting mechanism (70), which supports a plurality of substrates (W) in a state wherein the substrates are horizontally stacked in the vertical direction at an interval; and a sandwiching/inverting mechanism (80), which sandwiches each of the substrates (W) supported by the supporting mechanism (70), and which inverts the substrates at one time. In the supporting mechanism (70), when viewed from the vertical direction, a supporting member (74) that supports the substrates (W) is moved downward, while being moved away from the center of the substrates, and is moved to a sidetrack position from a supporting position. In the sandwiching/inverting mechanism (80), a sandwiching member (83) that sandwiches the substrates is moved from a distant position to a close position by means of a sandwiching member drive unit, and at the close position, the sandwiching member is elastically pressed toward the side surfacse of the substrates by means of an elastic member.</p> |
