| 摘要 |
PROBLEM TO BE SOLVED: To provide a template which can be produced easily when compared with prior art, and can form a resin pattern of good shape reliably, and to provide an imprint device.SOLUTION: The template has a planar template body, and a pattern of a predetermined shape formed on the surface of the template body. A substrate on which a resin layer is formed is held in a state where the pattern and the resin layer are in contact. The resin layer is hardened, and the shape of the pattern is transferred to the resin layer. A silicon wafer is stuck to a substrate for template, and the silicon wafer is etched thus forming the pattern. |
