发明名称 ADHESIVE COATING DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress variation in discharge quantity of a liquid adhesive per one time in an adhesive coating device, while enhancing the coating operation speed and the discharge position accuracy, and to increase the number of dischargeable times, while reducing manufacturing cost.SOLUTION: An adhesive coating device 1 provided in a die bonder includes a discharge tank 3 for discharging liquid adhesive 2 to a section supplied with adhesive, and a refill syringe 4 for refilling the discharge tank 3 with the liquid adhesive 2. Between the discharge tank 3 and the refill syringe 4, a check valve 7 for allowing supply of the liquid adhesive 2 from the refill syringe 4 to the discharge tank 3, and regulating the return of the liquid adhesive 2 from the discharge tank 3 to the refill syringe 4 is provided. The discharge tank 3 is a small capacity tank having a capacity smaller than that of the refill syringe 4.
申请公布号 JP2013254897(A) 申请公布日期 2013.12.19
申请号 JP20120130898 申请日期 2012.06.08
申请人 CANON MACHINERY INC 发明人 NAKATSU AKIRA
分类号 H01L21/52;B05C5/00;B05C11/10;H05K3/34 主分类号 H01L21/52
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