发明名称 |
METHOD FOR OPERATING AND/OR FOR MEASURING A MICROMECHANICAL DEVICE, AND MICROMECHANICAL DEVICE |
摘要 |
A method for operating and/or measuring a micromechanical device. The device has a first and second seismic mass which are movable by oscillation relative to a substrate; a first drive device for deflecting the first seismic mass and a second drive device for deflecting the second seismic mass, parallel to a drive direction in a first orientation; a third drive device for deflecting the first seismic mass, and a fourth drive device for deflecting the second seismic mass in parallel to the drive direction and according to a second orientation opposite from the first orientation; a first detection device for detecting drive motion of the first seismic mass; and a second detection device for detecting drive motion of the second seismic mass. A first and a second detection signal are generated by the first and second detection devices, the first detection signal being evaluated separately from the second detection signal. |
申请公布号 |
US2013333469(A1) |
申请公布日期 |
2013.12.19 |
申请号 |
US201313918556 |
申请日期 |
2013.06.14 |
申请人 |
CLASSEN JOHANNES;GAUGER CHRISTOPH;WELLNER PATRICK;ROBERT BOSCH GMBH |
发明人 |
CLASSEN JOHANNES;GAUGER CHRISTOPH;WELLNER PATRICK |
分类号 |
G01C19/56 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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